Isolation process induced wafer warpage

Electrochemical and Solid-State Letters

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Main Authors:	Jang, S.-A., Yeo, I.-S., Kim, Y.-B., Cho, B.-J., Lee, S.-K.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/80643
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-80643
record_format	dspace
spelling	sg-nus-scholar.10635-806432015-01-11T20:17:19Z Isolation process induced wafer warpage Jang, S.-A. Yeo, I.-S. Kim, Y.-B. Cho, B.-J. Lee, S.-K. ELECTRICAL ENGINEERING Electrochemical and Solid-State Letters 1 1 46-48 ESLEF 2014-10-07T02:59:45Z 2014-10-07T02:59:45Z 1998-07 Article Jang, S.-A.,Yeo, I.-S.,Kim, Y.-B.,Cho, B.-J.,Lee, S.-K. (1998-07). Isolation process induced wafer warpage. Electrochemical and Solid-State Letters 1 (1) : 46-48. ScholarBank@NUS Repository. 10990062 http://scholarbank.nus.edu.sg/handle/10635/80643 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Electrochemical and Solid-State Letters
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Jang, S.-A. Yeo, I.-S. Kim, Y.-B. Cho, B.-J. Lee, S.-K.
format	Article
author	Jang, S.-A. Yeo, I.-S. Kim, Y.-B. Cho, B.-J. Lee, S.-K.
spellingShingle	Jang, S.-A. Yeo, I.-S. Kim, Y.-B. Cho, B.-J. Lee, S.-K. Isolation process induced wafer warpage
author_sort	Jang, S.-A.
title	Isolation process induced wafer warpage
title_short	Isolation process induced wafer warpage
title_full	Isolation process induced wafer warpage
title_fullStr	Isolation process induced wafer warpage
title_full_unstemmed	Isolation process induced wafer warpage
title_sort	isolation process induced wafer warpage
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/80643
_version_	1681088925791158272

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