Isolation process induced wafer warpage

• Main Authors: Jang, S.-A., Yeo, I.-S., Kim, Y.-B., Cho, B.-J., Lee, S.-K.
• Other Authors: ELECTRICAL ENGINEERING
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/80643
• Institution: National University of Singapore

Electrochemical and Solid-State Letters