Monitoring of TiSi 2 formation on narrow polycrystalline silicon lines using raman spectroscopy

10.1109/55.669738

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Bibliographic Details
Main Authors:	Lim, E.H., Karunasiri, G., Chua, S.J., Wong, H., Pey, K.L., Lee, K.H.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/80752
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-807522023-10-29T20:26:24Z Monitoring of TiSi 2 formation on narrow polycrystalline silicon lines using raman spectroscopy Lim, E.H. Karunasiri, G. Chua, S.J. Wong, H. Pey, K.L. Lee, K.H. ELECTRICAL ENGINEERING 10.1109/55.669738 IEEE Electron Device Letters 19 5 171-173 EDLED 2014-10-07T03:00:55Z 2014-10-07T03:00:55Z 1998-05 Article Lim, E.H., Karunasiri, G., Chua, S.J., Wong, H., Pey, K.L., Lee, K.H. (1998-05). Monitoring of TiSi 2 formation on narrow polycrystalline silicon lines using raman spectroscopy. IEEE Electron Device Letters 19 (5) : 171-173. ScholarBank@NUS Repository. https://doi.org/10.1109/55.669738 07413106 http://scholarbank.nus.edu.sg/handle/10635/80752 000073176700009 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1109/55.669738
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Lim, E.H. Karunasiri, G. Chua, S.J. Wong, H. Pey, K.L. Lee, K.H.
format	Article
author	Lim, E.H. Karunasiri, G. Chua, S.J. Wong, H. Pey, K.L. Lee, K.H.
spellingShingle	Lim, E.H. Karunasiri, G. Chua, S.J. Wong, H. Pey, K.L. Lee, K.H. Monitoring of TiSi 2 formation on narrow polycrystalline silicon lines using raman spectroscopy
author_sort	Lim, E.H.
title	Monitoring of TiSi 2 formation on narrow polycrystalline silicon lines using raman spectroscopy
title_short	Monitoring of TiSi 2 formation on narrow polycrystalline silicon lines using raman spectroscopy
title_full	Monitoring of TiSi 2 formation on narrow polycrystalline silicon lines using raman spectroscopy
title_fullStr	Monitoring of TiSi 2 formation on narrow polycrystalline silicon lines using raman spectroscopy
title_full_unstemmed	Monitoring of TiSi 2 formation on narrow polycrystalline silicon lines using raman spectroscopy
title_sort	monitoring of tisi 2 formation on narrow polycrystalline silicon lines using raman spectroscopy
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/80752
_version_	1781783938788753408

Monitoring of TiSi 2 formation on narrow polycrystalline silicon lines using raman spectroscopy

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