Monitoring of TiSi 2 formation on narrow polycrystalline silicon lines using raman spectroscopy

10.1109/55.669738

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Bibliographic Details
Main Authors: Lim, E.H., Karunasiri, G., Chua, S.J., Wong, H., Pey, K.L., Lee, K.H.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/80752
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Institution: National University of Singapore
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