Pulsed laser deposition of TiN thin film on silicon (100) at different temperatures

Journal of Laser Applications

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Bibliographic Details
Main Authors:	Lu, Y.F., Wang, H.D., Ren, Z.M., Chong, T.C., Low, T.S., Wu, X.W., Cheng, B.A., Zhou, W.Z.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Laser ablation Nanoindentation Raman spectroscopy Thin films Titanium nitride
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81030
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-81030
record_format	dspace
spelling	sg-nus-scholar.10635-810302024-11-14T00:42:08Z Pulsed laser deposition of TiN thin film on silicon (100) at different temperatures Lu, Y.F. Wang, H.D. Ren, Z.M. Chong, T.C. Low, T.S. Wu, X.W. Cheng, B.A. Zhou, W.Z. ELECTRICAL ENGINEERING Laser ablation Nanoindentation Raman spectroscopy Thin films Titanium nitride Journal of Laser Applications 11 4 169-173 JLAPE 2014-10-07T03:03:54Z 2014-10-07T03:03:54Z 1999-08 Article Lu, Y.F.,Wang, H.D.,Ren, Z.M.,Chong, T.C.,Low, T.S.,Wu, X.W.,Cheng, B.A.,Zhou, W.Z. (1999-08). Pulsed laser deposition of TiN thin film on silicon (100) at different temperatures. Journal of Laser Applications 11 (4) : 169-173. ScholarBank@NUS Repository. 1042346X http://scholarbank.nus.edu.sg/handle/10635/81030 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Laser ablation Nanoindentation Raman spectroscopy Thin films Titanium nitride
spellingShingle	Laser ablation Nanoindentation Raman spectroscopy Thin films Titanium nitride Lu, Y.F. Wang, H.D. Ren, Z.M. Chong, T.C. Low, T.S. Wu, X.W. Cheng, B.A. Zhou, W.Z. Pulsed laser deposition of TiN thin film on silicon (100) at different temperatures
description	Journal of Laser Applications
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Lu, Y.F. Wang, H.D. Ren, Z.M. Chong, T.C. Low, T.S. Wu, X.W. Cheng, B.A. Zhou, W.Z.
format	Article
author	Lu, Y.F. Wang, H.D. Ren, Z.M. Chong, T.C. Low, T.S. Wu, X.W. Cheng, B.A. Zhou, W.Z.
author_sort	Lu, Y.F.
title	Pulsed laser deposition of TiN thin film on silicon (100) at different temperatures
title_short	Pulsed laser deposition of TiN thin film on silicon (100) at different temperatures
title_full	Pulsed laser deposition of TiN thin film on silicon (100) at different temperatures
title_fullStr	Pulsed laser deposition of TiN thin film on silicon (100) at different temperatures
title_full_unstemmed	Pulsed laser deposition of TiN thin film on silicon (100) at different temperatures
title_sort	pulsed laser deposition of tin thin film on silicon (100) at different temperatures
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81030
_version_	1821214355821166592

Pulsed laser deposition of TiN thin film on silicon (100) at different temperatures

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