Pulsed laser deposition of TiN thin film on silicon (100) at different temperatures

Pulsed laser deposition of TiN thin film on silicon (100) at different temperatures

Journal of Laser Applications

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Bibliographic Details
Main Authors:	Lu, Y.F., Wang, H.D., Ren, Z.M., Chong, T.C., Low, T.S., Wu, X.W., Cheng, B.A., Zhou, W.Z.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Laser ablation Nanoindentation Raman spectroscopy Thin films Titanium nitride
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81030
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Institution:	National University of Singapore

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