Semiconductor parameters extraction using cathodoluminescence in the scanning electron microscope

IEEE Transactions on Electron Devices

Saved in:
Bibliographic Details
Main Authors: Chan, Daniel S.H., Pey, Kin Leong, Phang, Jacob C.H.
Other Authors: INSTITUTE OF MICROELECTRONICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81149
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
Description
Summary:IEEE Transactions on Electron Devices