Semiconductor parameters extraction using cathodoluminescence in the scanning electron microscope
IEEE Transactions on Electron Devices
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Main Authors: | Chan, Daniel S.H., Pey, Kin Leong, Phang, Jacob C.H. |
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Other Authors: | INSTITUTE OF MICROELECTRONICS |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/81149 |
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Institution: | National University of Singapore |
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