Structural and electrical characterisations of rapid thermal annealed thin silicon oxide films on silicon
Thin Solid Films
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sg-nus-scholar.10635-812222024-11-09T00:15:39Z Structural and electrical characterisations of rapid thermal annealed thin silicon oxide films on silicon Chan, Y.M. Choo, C.K. Choi, W.K. ELECTRICAL ENGINEERING Annealing Oxide Silicon Thin Solid Films 317 1-2 219-222 THSFA 2014-10-07T03:05:57Z 2014-10-07T03:05:57Z 1998-04-01 Article Chan, Y.M.,Choo, C.K.,Choi, W.K. (1998-04-01). Structural and electrical characterisations of rapid thermal annealed thin silicon oxide films on silicon. Thin Solid Films 317 (1-2) : 219-222. ScholarBank@NUS Repository. 00406090 http://scholarbank.nus.edu.sg/handle/10635/81222 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| topic |
Annealing Oxide Silicon |
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Annealing Oxide Silicon Chan, Y.M. Choo, C.K. Choi, W.K. Structural and electrical characterisations of rapid thermal annealed thin silicon oxide films on silicon |
| description |
Thin Solid Films |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Chan, Y.M. Choo, C.K. Choi, W.K. |
| format |
Article |
| author |
Chan, Y.M. Choo, C.K. Choi, W.K. |
| author_sort |
Chan, Y.M. |
| title |
Structural and electrical characterisations of rapid thermal annealed thin silicon oxide films on silicon |
| title_short |
Structural and electrical characterisations of rapid thermal annealed thin silicon oxide films on silicon |
| title_full |
Structural and electrical characterisations of rapid thermal annealed thin silicon oxide films on silicon |
| title_fullStr |
Structural and electrical characterisations of rapid thermal annealed thin silicon oxide films on silicon |
| title_full_unstemmed |
Structural and electrical characterisations of rapid thermal annealed thin silicon oxide films on silicon |
| title_sort |
structural and electrical characterisations of rapid thermal annealed thin silicon oxide films on silicon |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/81222 |
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1821181293852884992 |