Variable axis lens of mixed electrostatic and magnetic fields and its application in electron-beam lithography systems
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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2014
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sg-nus-scholar.10635-813402015-02-07T15:38:31Z Variable axis lens of mixed electrostatic and magnetic fields and its application in electron-beam lithography systems Zhao, Y. Khursheed, A. ELECTRICAL ENGINEERING Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 17 6 2795-2796 JVTBD 2014-10-07T03:07:15Z 2014-10-07T03:07:15Z 1999 Article Zhao, Y.,Khursheed, A. (1999). Variable axis lens of mixed electrostatic and magnetic fields and its application in electron-beam lithography systems. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 17 (6) : 2795-2796. ScholarBank@NUS Repository. 10711023 http://scholarbank.nus.edu.sg/handle/10635/81340 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Singapore |
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ScholarBank@NUS |
| description |
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Zhao, Y. Khursheed, A. |
| format |
Article |
| author |
Zhao, Y. Khursheed, A. |
| spellingShingle |
Zhao, Y. Khursheed, A. Variable axis lens of mixed electrostatic and magnetic fields and its application in electron-beam lithography systems |
| author_sort |
Zhao, Y. |
| title |
Variable axis lens of mixed electrostatic and magnetic fields and its application in electron-beam lithography systems |
| title_short |
Variable axis lens of mixed electrostatic and magnetic fields and its application in electron-beam lithography systems |
| title_full |
Variable axis lens of mixed electrostatic and magnetic fields and its application in electron-beam lithography systems |
| title_fullStr |
Variable axis lens of mixed electrostatic and magnetic fields and its application in electron-beam lithography systems |
| title_full_unstemmed |
Variable axis lens of mixed electrostatic and magnetic fields and its application in electron-beam lithography systems |
| title_sort |
variable axis lens of mixed electrostatic and magnetic fields and its application in electron-beam lithography systems |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/81340 |
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1681089053584261120 |