X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems

Journal of Applied Physics

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Main Authors: Choi, W.K., Poon, F.W., Loh, F.C., Tan, K.L.
Other Authors: ELECTRICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81366
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-813662024-11-09T04:03:56Z X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems Choi, W.K. Poon, F.W. Loh, F.C. Tan, K.L. ELECTRICAL ENGINEERING PHYSICS Journal of Applied Physics 81 11 7386-7391 JAPIA 2014-10-07T03:07:31Z 2014-10-07T03:07:31Z 1997-06-01 Article Choi, W.K.,Poon, F.W.,Loh, F.C.,Tan, K.L. (1997-06-01). X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems. Journal of Applied Physics 81 (11) : 7386-7391. ScholarBank@NUS Repository. 00218979 http://scholarbank.nus.edu.sg/handle/10635/81366 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description Journal of Applied Physics
author2 ELECTRICAL ENGINEERING
author_facet ELECTRICAL ENGINEERING
Choi, W.K.
Poon, F.W.
Loh, F.C.
Tan, K.L.
format Article
author Choi, W.K.
Poon, F.W.
Loh, F.C.
Tan, K.L.
spellingShingle Choi, W.K.
Poon, F.W.
Loh, F.C.
Tan, K.L.
X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems
author_sort Choi, W.K.
title X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems
title_short X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems
title_full X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems
title_fullStr X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems
title_full_unstemmed X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems
title_sort x-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/81366
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