X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems
Journal of Applied Physics
Saved in:
Main Authors: | , , , |
---|---|
Other Authors: | |
Format: | Article |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/81366 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
id |
sg-nus-scholar.10635-81366 |
---|---|
record_format |
dspace |
spelling |
sg-nus-scholar.10635-813662024-11-09T04:03:56Z X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems Choi, W.K. Poon, F.W. Loh, F.C. Tan, K.L. ELECTRICAL ENGINEERING PHYSICS Journal of Applied Physics 81 11 7386-7391 JAPIA 2014-10-07T03:07:31Z 2014-10-07T03:07:31Z 1997-06-01 Article Choi, W.K.,Poon, F.W.,Loh, F.C.,Tan, K.L. (1997-06-01). X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems. Journal of Applied Physics 81 (11) : 7386-7391. ScholarBank@NUS Repository. 00218979 http://scholarbank.nus.edu.sg/handle/10635/81366 NOT_IN_WOS Scopus |
institution |
National University of Singapore |
building |
NUS Library |
continent |
Asia |
country |
Singapore Singapore |
content_provider |
NUS Library |
collection |
ScholarBank@NUS |
description |
Journal of Applied Physics |
author2 |
ELECTRICAL ENGINEERING |
author_facet |
ELECTRICAL ENGINEERING Choi, W.K. Poon, F.W. Loh, F.C. Tan, K.L. |
format |
Article |
author |
Choi, W.K. Poon, F.W. Loh, F.C. Tan, K.L. |
spellingShingle |
Choi, W.K. Poon, F.W. Loh, F.C. Tan, K.L. X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems |
author_sort |
Choi, W.K. |
title |
X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems |
title_short |
X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems |
title_full |
X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems |
title_fullStr |
X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems |
title_full_unstemmed |
X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems |
title_sort |
x-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems |
publishDate |
2014 |
url |
http://scholarbank.nus.edu.sg/handle/10635/81366 |
_version_ |
1821232165026791424 |