X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems
Journal of Applied Physics
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sg-nus-scholar.10635-813662015-01-07T04:37:20Z X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems Choi, W.K. Poon, F.W. Loh, F.C. Tan, K.L. PHYSICS ELECTRICAL ENGINEERING Journal of Applied Physics 81 11 7386-7391 JAPIA 2014-10-07T03:07:31Z 2014-10-07T03:07:31Z 1997-06-01 Article Choi, W.K.,Poon, F.W.,Loh, F.C.,Tan, K.L. (1997-06-01). X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems. Journal of Applied Physics 81 (11) : 7386-7391. ScholarBank@NUS Repository. 00218979 http://scholarbank.nus.edu.sg/handle/10635/81366 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Singapore |
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| description |
Journal of Applied Physics |
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PHYSICS |
| author_facet |
PHYSICS Choi, W.K. Poon, F.W. Loh, F.C. Tan, K.L. |
| format |
Article |
| author |
Choi, W.K. Poon, F.W. Loh, F.C. Tan, K.L. |
| spellingShingle |
Choi, W.K. Poon, F.W. Loh, F.C. Tan, K.L. X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems |
| author_sort |
Choi, W.K. |
| title |
X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems |
| title_short |
X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems |
| title_full |
X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems |
| title_fullStr |
X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems |
| title_full_unstemmed |
X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems |
| title_sort |
x-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/81366 |
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1681089058155003904 |