X-ray photoelectron spectroscopy study of rapid thermal annealed silicon-silicon oxide systems

Journal of Applied Physics

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Bibliographic Details
Main Authors: Choi, W.K., Poon, F.W., Loh, F.C., Tan, K.L.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81366
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Institution: National University of Singapore
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