Imaging of charging specimens at high beam energies in the SEM
Proceedings of the International Symposium on the Physical 7 Failure Analysis of Integrated Circuits, IPFA
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2014
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sg-nus-scholar.10635-814652015-01-30T20:37:26Z Imaging of charging specimens at high beam energies in the SEM Wong, W.K. Phang, J.C.H. Thong, J.T.L. ELECTRICAL ENGINEERING Proceedings of the International Symposium on the Physical 7 Failure Analysis of Integrated Circuits, IPFA 55-59 234 2014-10-07T03:08:36Z 2014-10-07T03:08:36Z 1995 Conference Paper Wong, W.K.,Phang, J.C.H.,Thong, J.T.L. (1995). Imaging of charging specimens at high beam energies in the SEM. Proceedings of the International Symposium on the Physical 7 Failure Analysis of Integrated Circuits, IPFA : 55-59. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/81465 NOT_IN_WOS Scopus |
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National University of Singapore |
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Singapore |
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ScholarBank@NUS |
| description |
Proceedings of the International Symposium on the Physical 7 Failure Analysis of Integrated Circuits, IPFA |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Wong, W.K. Phang, J.C.H. Thong, J.T.L. |
| format |
Conference or Workshop Item |
| author |
Wong, W.K. Phang, J.C.H. Thong, J.T.L. |
| spellingShingle |
Wong, W.K. Phang, J.C.H. Thong, J.T.L. Imaging of charging specimens at high beam energies in the SEM |
| author_sort |
Wong, W.K. |
| title |
Imaging of charging specimens at high beam energies in the SEM |
| title_short |
Imaging of charging specimens at high beam energies in the SEM |
| title_full |
Imaging of charging specimens at high beam energies in the SEM |
| title_fullStr |
Imaging of charging specimens at high beam energies in the SEM |
| title_full_unstemmed |
Imaging of charging specimens at high beam energies in the SEM |
| title_sort |
imaging of charging specimens at high beam energies in the sem |
| publishDate |
2014 |
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http://scholarbank.nus.edu.sg/handle/10635/81465 |
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1681089076251328512 |