Imaging of charging specimens at high beam energies in the SEM

• Main Authors: Wong, W.K., Phang, J.C.H., Thong, J.T.L.
• Other Authors: ELECTRICAL ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/81465
• Institution: National University of Singapore

Proceedings of the International Symposium on the Physical 7 Failure Analysis of Integrated Circuits, IPFA