Numerical prediction of etched profile in pyrolytic laser etching

• Main Authors: Wee, T.S., Lu, Y.F., Chim, W.K.
• 其他作者: ELECTRICAL ENGINEERING
• 格式: Conference or Workshop Item
• 出版: 2014
• 主題: Carbon tetrachloride; Diffused reflection; Finite element method; Heat conduction analysis; Laser etched profile; Laser induced temperature profile; Numerical laser etching model; Pyrolytic laser etching; Silicon
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/81621

10.1117/12.280576