Pulsed laser deposition of AlN thin films

Proceedings of SPIE - The International Society for Optical Engineering

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Bibliographic Details
Main Authors: Lu, Y.F., Ren, Z.M., Ni, H.Q., Goh, Y.W., Cheong, B.A., Chow, S.K., Wang, J.P., Chong, T.C.
Other Authors: ELECTRICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81690
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Institution: National University of Singapore
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Summary:Proceedings of SPIE - The International Society for Optical Engineering