Pulsed laser deposition of AlN thin films

Proceedings of SPIE - The International Society for Optical Engineering

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Bibliographic Details
Main Authors:	Lu, Y.F., Ren, Z.M., Ni, H.Q., Goh, Y.W., Cheong, B.A., Chow, S.K., Wang, J.P., Chong, T.C.
Other Authors:	ELECTRICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81690
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-81690
record_format	dspace
spelling	sg-nus-scholar.10635-816902015-01-15T23:34:26Z Pulsed laser deposition of AlN thin films Lu, Y.F. Ren, Z.M. Ni, H.Q. Goh, Y.W. Cheong, B.A. Chow, S.K. Wang, J.P. Chong, T.C. ELECTRICAL ENGINEERING ELECTRICAL & COMPUTER ENGINEERING Proceedings of SPIE - The International Society for Optical Engineering 3933 182-189 PSISD 2014-10-07T03:10:58Z 2014-10-07T03:10:58Z 2000 Conference Paper Lu, Y.F.,Ren, Z.M.,Ni, H.Q.,Goh, Y.W.,Cheong, B.A.,Chow, S.K.,Wang, J.P.,Chong, T.C. (2000). Pulsed laser deposition of AlN thin films. Proceedings of SPIE - The International Society for Optical Engineering 3933 : 182-189. ScholarBank@NUS Repository. 0277786X http://scholarbank.nus.edu.sg/handle/10635/81690 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Proceedings of SPIE - The International Society for Optical Engineering
author2	ELECTRICAL ENGINEERING
author_facet	ELECTRICAL ENGINEERING Lu, Y.F. Ren, Z.M. Ni, H.Q. Goh, Y.W. Cheong, B.A. Chow, S.K. Wang, J.P. Chong, T.C.
format	Conference or Workshop Item
author	Lu, Y.F. Ren, Z.M. Ni, H.Q. Goh, Y.W. Cheong, B.A. Chow, S.K. Wang, J.P. Chong, T.C.
spellingShingle	Lu, Y.F. Ren, Z.M. Ni, H.Q. Goh, Y.W. Cheong, B.A. Chow, S.K. Wang, J.P. Chong, T.C. Pulsed laser deposition of AlN thin films
author_sort	Lu, Y.F.
title	Pulsed laser deposition of AlN thin films
title_short	Pulsed laser deposition of AlN thin films
title_full	Pulsed laser deposition of AlN thin films
title_fullStr	Pulsed laser deposition of AlN thin films
title_full_unstemmed	Pulsed laser deposition of AlN thin films
title_sort	pulsed laser deposition of aln thin films
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81690
_version_	1681089117204512768

Pulsed laser deposition of AlN thin films

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