Pulsed laser deposition of AlN thin films

• Main Authors: Lu, Y.F., Ren, Z.M., Ni, H.Q., Goh, Y.W., Cheong, B.A., Chow, S.K., Wang, J.P., Chong, T.C.
• Other Authors: ELECTRICAL ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/81690
• Institution: National University of Singapore

Proceedings of SPIE - The International Society for Optical Engineering