A comparison of the selective etching characteristics of conventional and low-temperature-grown GaAs over AlAs by various etching solutions
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
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2014
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sg-nus-scholar.10635-818142015-02-18T00:18:16Z A comparison of the selective etching characteristics of conventional and low-temperature-grown GaAs over AlAs by various etching solutions Zhao, R. Lau, W.S. Chong, T.C. Li, M.F. ELECTRICAL ENGINEERING AlAs GaAs LT GaAs Wet selective etching Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 35 1 A 22-25 JAPND 2014-10-07T03:12:19Z 2014-10-07T03:12:19Z 1996-01 Review Zhao, R.,Lau, W.S.,Chong, T.C.,Li, M.F. (1996-01). A comparison of the selective etching characteristics of conventional and low-temperature-grown GaAs over AlAs by various etching solutions. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 35 (1 A) : 22-25. ScholarBank@NUS Repository. 00214922 http://scholarbank.nus.edu.sg/handle/10635/81814 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
| country |
Singapore |
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| topic |
AlAs GaAs LT GaAs Wet selective etching |
| spellingShingle |
AlAs GaAs LT GaAs Wet selective etching Zhao, R. Lau, W.S. Chong, T.C. Li, M.F. A comparison of the selective etching characteristics of conventional and low-temperature-grown GaAs over AlAs by various etching solutions |
| description |
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Zhao, R. Lau, W.S. Chong, T.C. Li, M.F. |
| format |
Review |
| author |
Zhao, R. Lau, W.S. Chong, T.C. Li, M.F. |
| author_sort |
Zhao, R. |
| title |
A comparison of the selective etching characteristics of conventional and low-temperature-grown GaAs over AlAs by various etching solutions |
| title_short |
A comparison of the selective etching characteristics of conventional and low-temperature-grown GaAs over AlAs by various etching solutions |
| title_full |
A comparison of the selective etching characteristics of conventional and low-temperature-grown GaAs over AlAs by various etching solutions |
| title_fullStr |
A comparison of the selective etching characteristics of conventional and low-temperature-grown GaAs over AlAs by various etching solutions |
| title_full_unstemmed |
A comparison of the selective etching characteristics of conventional and low-temperature-grown GaAs over AlAs by various etching solutions |
| title_sort |
comparison of the selective etching characteristics of conventional and low-temperature-grown gaas over alas by various etching solutions |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/81814 |
| _version_ |
1681089139612581888 |