Electrical characterization of rapid thermal annealed radio frequency sputtered silicon oxide films
Journal of Applied Physics
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2014
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| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/81817 |
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sg-nus-scholar.10635-818172024-11-10T16:37:13Z Electrical characterization of rapid thermal annealed radio frequency sputtered silicon oxide films Choi, W.K. Choo, C.K. Lu, Y.F. ELECTRICAL ENGINEERING Journal of Applied Physics 80 10 5837-5842 JAPIA 2014-10-07T03:12:21Z 2014-10-07T03:12:21Z 1996-11-15 Review Choi, W.K.,Choo, C.K.,Lu, Y.F. (1996-11-15). Electrical characterization of rapid thermal annealed radio frequency sputtered silicon oxide films. Journal of Applied Physics 80 (10) : 5837-5842. ScholarBank@NUS Repository. 00218979 http://scholarbank.nus.edu.sg/handle/10635/81817 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
Journal of Applied Physics |
| author2 |
ELECTRICAL ENGINEERING |
| author_facet |
ELECTRICAL ENGINEERING Choi, W.K. Choo, C.K. Lu, Y.F. |
| format |
Review |
| author |
Choi, W.K. Choo, C.K. Lu, Y.F. |
| spellingShingle |
Choi, W.K. Choo, C.K. Lu, Y.F. Electrical characterization of rapid thermal annealed radio frequency sputtered silicon oxide films |
| author_sort |
Choi, W.K. |
| title |
Electrical characterization of rapid thermal annealed radio frequency sputtered silicon oxide films |
| title_short |
Electrical characterization of rapid thermal annealed radio frequency sputtered silicon oxide films |
| title_full |
Electrical characterization of rapid thermal annealed radio frequency sputtered silicon oxide films |
| title_fullStr |
Electrical characterization of rapid thermal annealed radio frequency sputtered silicon oxide films |
| title_full_unstemmed |
Electrical characterization of rapid thermal annealed radio frequency sputtered silicon oxide films |
| title_sort |
electrical characterization of rapid thermal annealed radio frequency sputtered silicon oxide films |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/81817 |
| _version_ |
1821220156695642112 |