Electrical characterization of rapid thermal annealed radio frequency sputtered silicon oxide films

Journal of Applied Physics

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Bibliographic Details
Main Authors: Choi, W.K., Choo, C.K., Lu, Y.F.
Other Authors: ELECTRICAL ENGINEERING
Format: Review
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81817
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Institution: National University of Singapore

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