A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator

A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator

10.1364/OE.19.013812

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Bibliographic Details
Main Authors: Koh, K.H., Kobayashi, T., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81839
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Institution: National University of Singapore
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Summary:10.1364/OE.19.013812

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