A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator

A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator

10.1364/OE.19.013812

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Main Authors: Koh, K.H., Kobayashi, T., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/81839
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Institution: National University of Singapore
id sg-nus-scholar.10635-81839
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spelling sg-nus-scholar.10635-818392023-10-26T09:48:09Z A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator Koh, K.H. Kobayashi, T. Lee, C. ELECTRICAL & COMPUTER ENGINEERING 10.1364/OE.19.013812 Optics Express 19 15 13812-13824 2014-10-07T04:22:18Z 2014-10-07T04:22:18Z 2011-07-18 Article Koh, K.H., Kobayashi, T., Lee, C. (2011-07-18). A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator. Optics Express 19 (15) : 13812-13824. ScholarBank@NUS Repository. https://doi.org/10.1364/OE.19.013812 10944087 http://scholarbank.nus.edu.sg/handle/10635/81839 000292877600011 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1364/OE.19.013812
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Koh, K.H.
Kobayashi, T.
Lee, C.
format Article
author Koh, K.H.
Kobayashi, T.
Lee, C.
spellingShingle Koh, K.H.
Kobayashi, T.
Lee, C.
A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator
author_sort Koh, K.H.
title A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator
title_short A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator
title_full A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator
title_fullStr A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator
title_full_unstemmed A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator
title_sort 2-d mems scanning mirror based on dynamic mixed mode excitation of a piezoelectric pzt thin film s-shaped actuator
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/81839
_version_ 1781783995442266112

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