A self-aligned Ni-InGaAs contact technology for InGaAs channel n-MOSFETs

10.1149/2.060205jes

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Bibliographic Details
Main Authors:	Zhang, X., Ivana, Guo, H.X., Gong, X., Zhou, Q., Yeo, Y.-C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/81907
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-81907
record_format	dspace
spelling	sg-nus-scholar.10635-819072023-10-30T07:57:59Z A self-aligned Ni-InGaAs contact technology for InGaAs channel n-MOSFETs Zhang, X. Ivana Guo, H.X. Gong, X. Zhou, Q. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1149/2.060205jes Journal of the Electrochemical Society 159 5 H511-H515 JESOA 2014-10-07T04:23:06Z 2014-10-07T04:23:06Z 2012 Article Zhang, X., Ivana, Guo, H.X., Gong, X., Zhou, Q., Yeo, Y.-C. (2012). A self-aligned Ni-InGaAs contact technology for InGaAs channel n-MOSFETs. Journal of the Electrochemical Society 159 (5) : H511-H515. ScholarBank@NUS Repository. https://doi.org/10.1149/2.060205jes 00134651 http://scholarbank.nus.edu.sg/handle/10635/81907 000302211800065 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1149/2.060205jes
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Zhang, X. Ivana Guo, H.X. Gong, X. Zhou, Q. Yeo, Y.-C.
format	Article
author	Zhang, X. Ivana Guo, H.X. Gong, X. Zhou, Q. Yeo, Y.-C.
spellingShingle	Zhang, X. Ivana Guo, H.X. Gong, X. Zhou, Q. Yeo, Y.-C. A self-aligned Ni-InGaAs contact technology for InGaAs channel n-MOSFETs
author_sort	Zhang, X.
title	A self-aligned Ni-InGaAs contact technology for InGaAs channel n-MOSFETs
title_short	A self-aligned Ni-InGaAs contact technology for InGaAs channel n-MOSFETs
title_full	A self-aligned Ni-InGaAs contact technology for InGaAs channel n-MOSFETs
title_fullStr	A self-aligned Ni-InGaAs contact technology for InGaAs channel n-MOSFETs
title_full_unstemmed	A self-aligned Ni-InGaAs contact technology for InGaAs channel n-MOSFETs
title_sort	self-aligned ni-ingaas contact technology for ingaas channel n-mosfets
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/81907
_version_	1781784012728041472

A self-aligned Ni-InGaAs contact technology for InGaAs channel n-MOSFETs

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