Correlation between optical properties and Si nanocrystal formation of Si-rich Si oxide films prepared by plasma-enhanced chemical vapor deposition

Correlation between optical properties and Si nanocrystal formation of Si-rich Si oxide films prepared by plasma-enhanced chemical vapor deposition

10.1016/j.apsusc.2006.05.060

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Bibliographic Details
Main Authors: Chen, X.Y., Lu, Y.F., Wu, Y.H., Cho, B.J., Tang, L.J., Lu, D., Dong, J.R.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Optical properties
Plasma-enhanced chemical vapor deposition
Silicon nanocrystals
Silicon oxide
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82101
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Institution: National University of Singapore
Description
Summary:10.1016/j.apsusc.2006.05.060

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