Correlation between optical properties and Si nanocrystal formation of Si-rich Si oxide films prepared by plasma-enhanced chemical vapor deposition

10.1016/j.apsusc.2006.05.060

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Bibliographic Details
Main Authors:	Chen, X.Y., Lu, Y.F., Wu, Y.H., Cho, B.J., Tang, L.J., Lu, D., Dong, J.R.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Optical properties Plasma-enhanced chemical vapor deposition Silicon nanocrystals Silicon oxide
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82101
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82101
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spelling	sg-nus-scholar.10635-821012023-10-29T23:36:18Z Correlation between optical properties and Si nanocrystal formation of Si-rich Si oxide films prepared by plasma-enhanced chemical vapor deposition Chen, X.Y. Lu, Y.F. Wu, Y.H. Cho, B.J. Tang, L.J. Lu, D. Dong, J.R. ELECTRICAL & COMPUTER ENGINEERING Optical properties Plasma-enhanced chemical vapor deposition Silicon nanocrystals Silicon oxide 10.1016/j.apsusc.2006.05.060 Applied Surface Science 253 5 2718-2726 ASUSE 2014-10-07T04:25:24Z 2014-10-07T04:25:24Z 2006-12-30 Article Chen, X.Y., Lu, Y.F., Wu, Y.H., Cho, B.J., Tang, L.J., Lu, D., Dong, J.R. (2006-12-30). Correlation between optical properties and Si nanocrystal formation of Si-rich Si oxide films prepared by plasma-enhanced chemical vapor deposition. Applied Surface Science 253 (5) : 2718-2726. ScholarBank@NUS Repository. https://doi.org/10.1016/j.apsusc.2006.05.060 01694332 http://scholarbank.nus.edu.sg/handle/10635/82101 000243244300059 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Optical properties Plasma-enhanced chemical vapor deposition Silicon nanocrystals Silicon oxide
spellingShingle	Optical properties Plasma-enhanced chemical vapor deposition Silicon nanocrystals Silicon oxide Chen, X.Y. Lu, Y.F. Wu, Y.H. Cho, B.J. Tang, L.J. Lu, D. Dong, J.R. Correlation between optical properties and Si nanocrystal formation of Si-rich Si oxide films prepared by plasma-enhanced chemical vapor deposition
description	10.1016/j.apsusc.2006.05.060
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Chen, X.Y. Lu, Y.F. Wu, Y.H. Cho, B.J. Tang, L.J. Lu, D. Dong, J.R.
format	Article
author	Chen, X.Y. Lu, Y.F. Wu, Y.H. Cho, B.J. Tang, L.J. Lu, D. Dong, J.R.
author_sort	Chen, X.Y.
title	Correlation between optical properties and Si nanocrystal formation of Si-rich Si oxide films prepared by plasma-enhanced chemical vapor deposition
title_short	Correlation between optical properties and Si nanocrystal formation of Si-rich Si oxide films prepared by plasma-enhanced chemical vapor deposition
title_full	Correlation between optical properties and Si nanocrystal formation of Si-rich Si oxide films prepared by plasma-enhanced chemical vapor deposition
title_fullStr	Correlation between optical properties and Si nanocrystal formation of Si-rich Si oxide films prepared by plasma-enhanced chemical vapor deposition
title_full_unstemmed	Correlation between optical properties and Si nanocrystal formation of Si-rich Si oxide films prepared by plasma-enhanced chemical vapor deposition
title_sort	correlation between optical properties and si nanocrystal formation of si-rich si oxide films prepared by plasma-enhanced chemical vapor deposition
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82101
_version_	1781784060387917824

Correlation between optical properties and Si nanocrystal formation of Si-rich Si oxide films prepared by plasma-enhanced chemical vapor deposition

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