Crystalline zirconia oxide on silicon as alternative gate dielectrics

Crystalline zirconia oxide on silicon as alternative gate dielectrics

10.1063/1.1354161

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Bibliographic Details
Main Authors: Wang, S.J., Ong, C.K., Xu, S.Y., Chen, P., Tjiu, W.C., Chai, J.W., Huan, A.C.H., Yoo, W.J., Lim, J.S., Feng, W., Choi, W.K.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82109
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Institution: National University of Singapore
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Summary:10.1063/1.1354161

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