Crystalline zirconia oxide on silicon as alternative gate dielectrics

10.1063/1.1354161

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Bibliographic Details
Main Authors:	Wang, S.J., Ong, C.K., Xu, S.Y., Chen, P., Tjiu, W.C., Chai, J.W., Huan, A.C.H., Yoo, W.J., Lim, J.S., Feng, W., Choi, W.K.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82109
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82109
record_format	dspace
spelling	sg-nus-scholar.10635-821092024-11-12T22:38:23Z Crystalline zirconia oxide on silicon as alternative gate dielectrics Wang, S.J. Ong, C.K. Xu, S.Y. Chen, P. Tjiu, W.C. Chai, J.W. Huan, A.C.H. Yoo, W.J. Lim, J.S. Feng, W. Choi, W.K. ELECTRICAL & COMPUTER ENGINEERING INSTITUTE OF ENGINEERING SCIENCE PHYSICS 10.1063/1.1354161 Applied Physics Letters 78 11 1604-1606 APPLA 2014-10-07T04:25:30Z 2014-10-07T04:25:30Z 2001-03-12 Article Wang, S.J., Ong, C.K., Xu, S.Y., Chen, P., Tjiu, W.C., Chai, J.W., Huan, A.C.H., Yoo, W.J., Lim, J.S., Feng, W., Choi, W.K. (2001-03-12). Crystalline zirconia oxide on silicon as alternative gate dielectrics. Applied Physics Letters 78 (11) : 1604-1606. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1354161 00036951 http://scholarbank.nus.edu.sg/handle/10635/82109 000167364700048 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.1354161
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Wang, S.J. Ong, C.K. Xu, S.Y. Chen, P. Tjiu, W.C. Chai, J.W. Huan, A.C.H. Yoo, W.J. Lim, J.S. Feng, W. Choi, W.K.
format	Article
author	Wang, S.J. Ong, C.K. Xu, S.Y. Chen, P. Tjiu, W.C. Chai, J.W. Huan, A.C.H. Yoo, W.J. Lim, J.S. Feng, W. Choi, W.K.
spellingShingle	Wang, S.J. Ong, C.K. Xu, S.Y. Chen, P. Tjiu, W.C. Chai, J.W. Huan, A.C.H. Yoo, W.J. Lim, J.S. Feng, W. Choi, W.K. Crystalline zirconia oxide on silicon as alternative gate dielectrics
author_sort	Wang, S.J.
title	Crystalline zirconia oxide on silicon as alternative gate dielectrics
title_short	Crystalline zirconia oxide on silicon as alternative gate dielectrics
title_full	Crystalline zirconia oxide on silicon as alternative gate dielectrics
title_fullStr	Crystalline zirconia oxide on silicon as alternative gate dielectrics
title_full_unstemmed	Crystalline zirconia oxide on silicon as alternative gate dielectrics
title_sort	crystalline zirconia oxide on silicon as alternative gate dielectrics
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82109
_version_	1821211785794945024

Crystalline zirconia oxide on silicon as alternative gate dielectrics

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