Deep anisotropic LiNbO 3 etching with SF 6/Ar inductively coupled plasmas

10.1116/1.3674282

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Bibliographic Details
Main Authors:	Jun, D., Wei, J., Png, C.E., Guangyuan, S., Son, J., Yang, H., Danner, A.J.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82115
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82115
record_format	dspace
spelling	sg-nus-scholar.10635-821152024-11-13T13:21:56Z Deep anisotropic LiNbO 3 etching with SF 6/Ar inductively coupled plasmas Jun, D. Wei, J. Png, C.E. Guangyuan, S. Son, J. Yang, H. Danner, A.J. ELECTRICAL & COMPUTER ENGINEERING 10.1116/1.3674282 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 30 1 - JVTBD 2014-10-07T04:25:34Z 2014-10-07T04:25:34Z 2012-01 Article Jun, D., Wei, J., Png, C.E., Guangyuan, S., Son, J., Yang, H., Danner, A.J. (2012-01). Deep anisotropic LiNbO 3 etching with SF 6/Ar inductively coupled plasmas. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 30 (1) : -. ScholarBank@NUS Repository. https://doi.org/10.1116/1.3674282 10711023 http://scholarbank.nus.edu.sg/handle/10635/82115 000299388200016 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1116/1.3674282
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Jun, D. Wei, J. Png, C.E. Guangyuan, S. Son, J. Yang, H. Danner, A.J.
format	Article
author	Jun, D. Wei, J. Png, C.E. Guangyuan, S. Son, J. Yang, H. Danner, A.J.
spellingShingle	Jun, D. Wei, J. Png, C.E. Guangyuan, S. Son, J. Yang, H. Danner, A.J. Deep anisotropic LiNbO 3 etching with SF 6/Ar inductively coupled plasmas
author_sort	Jun, D.
title	Deep anisotropic LiNbO 3 etching with SF 6/Ar inductively coupled plasmas
title_short	Deep anisotropic LiNbO 3 etching with SF 6/Ar inductively coupled plasmas
title_full	Deep anisotropic LiNbO 3 etching with SF 6/Ar inductively coupled plasmas
title_fullStr	Deep anisotropic LiNbO 3 etching with SF 6/Ar inductively coupled plasmas
title_full_unstemmed	Deep anisotropic LiNbO 3 etching with SF 6/Ar inductively coupled plasmas
title_sort	deep anisotropic linbo 3 etching with sf 6/ar inductively coupled plasmas
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82115
_version_	1821189722512293888

Deep anisotropic LiNbO 3 etching with SF 6/Ar inductively coupled plasmas

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