Effects of sulfur passivation on germanium MOS capacitors With HfON gate dielectric

Effects of sulfur passivation on germanium MOS capacitors With HfON gate dielectric

10.1109/LED.2007.907415

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Bibliographic Details
Main Authors: Xie, R., Zhu, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Germanium (Ge)
MOS capacitor
Sulfur (S) passivation
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82237
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/82237

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