Effects of sulfur passivation on germanium MOS capacitors With HfON gate dielectric

10.1109/LED.2007.907415

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Main Authors: Xie, R., Zhu, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82237
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-822372023-10-30T22:33:27Z Effects of sulfur passivation on germanium MOS capacitors With HfON gate dielectric Xie, R. Zhu, C. ELECTRICAL & COMPUTER ENGINEERING Germanium (Ge) MOS capacitor Sulfur (S) passivation 10.1109/LED.2007.907415 IEEE Electron Device Letters 28 11 976-979 EDLED 2014-10-07T04:27:00Z 2014-10-07T04:27:00Z 2007-11 Article Xie, R., Zhu, C. (2007-11). Effects of sulfur passivation on germanium MOS capacitors With HfON gate dielectric. IEEE Electron Device Letters 28 (11) : 976-979. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2007.907415 07413106 http://scholarbank.nus.edu.sg/handle/10635/82237 000250524200014 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Germanium (Ge)
MOS capacitor
Sulfur (S) passivation
spellingShingle Germanium (Ge)
MOS capacitor
Sulfur (S) passivation
Xie, R.
Zhu, C.
Effects of sulfur passivation on germanium MOS capacitors With HfON gate dielectric
description 10.1109/LED.2007.907415
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Xie, R.
Zhu, C.
format Article
author Xie, R.
Zhu, C.
author_sort Xie, R.
title Effects of sulfur passivation on germanium MOS capacitors With HfON gate dielectric
title_short Effects of sulfur passivation on germanium MOS capacitors With HfON gate dielectric
title_full Effects of sulfur passivation on germanium MOS capacitors With HfON gate dielectric
title_fullStr Effects of sulfur passivation on germanium MOS capacitors With HfON gate dielectric
title_full_unstemmed Effects of sulfur passivation on germanium MOS capacitors With HfON gate dielectric
title_sort effects of sulfur passivation on germanium mos capacitors with hfon gate dielectric
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/82237
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