Electrical properties of crystalline YSZ films on silicon as alternative gate dielectrics
10.1088/0268-1242/16/3/101
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2014
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sg-nus-scholar.10635-822512024-11-12T22:38:24Z Electrical properties of crystalline YSZ films on silicon as alternative gate dielectrics Wang, S.J. Ong, C.K. Xu, S.Y. Chen, P. Tjiu, W.C. Huan, A.C.H. Yoo, W.J. Lim, J.S. Feng, W. Choi, W.K. ELECTRICAL & COMPUTER ENGINEERING INSTITUTE OF ENGINEERING SCIENCE PHYSICS 10.1088/0268-1242/16/3/101 Semiconductor Science and Technology 16 3 L13-L16 SSTEE 2014-10-07T04:27:09Z 2014-10-07T04:27:09Z 2001-03 Article Wang, S.J., Ong, C.K., Xu, S.Y., Chen, P., Tjiu, W.C., Huan, A.C.H., Yoo, W.J., Lim, J.S., Feng, W., Choi, W.K. (2001-03). Electrical properties of crystalline YSZ films on silicon as alternative gate dielectrics. Semiconductor Science and Technology 16 (3) : L13-L16. ScholarBank@NUS Repository. https://doi.org/10.1088/0268-1242/16/3/101 02681242 http://scholarbank.nus.edu.sg/handle/10635/82251 000167476200001 Scopus |
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Singapore Singapore |
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10.1088/0268-1242/16/3/101 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
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ELECTRICAL & COMPUTER ENGINEERING Wang, S.J. Ong, C.K. Xu, S.Y. Chen, P. Tjiu, W.C. Huan, A.C.H. Yoo, W.J. Lim, J.S. Feng, W. Choi, W.K. |
| format |
Article |
| author |
Wang, S.J. Ong, C.K. Xu, S.Y. Chen, P. Tjiu, W.C. Huan, A.C.H. Yoo, W.J. Lim, J.S. Feng, W. Choi, W.K. |
| spellingShingle |
Wang, S.J. Ong, C.K. Xu, S.Y. Chen, P. Tjiu, W.C. Huan, A.C.H. Yoo, W.J. Lim, J.S. Feng, W. Choi, W.K. Electrical properties of crystalline YSZ films on silicon as alternative gate dielectrics |
| author_sort |
Wang, S.J. |
| title |
Electrical properties of crystalline YSZ films on silicon as alternative gate dielectrics |
| title_short |
Electrical properties of crystalline YSZ films on silicon as alternative gate dielectrics |
| title_full |
Electrical properties of crystalline YSZ films on silicon as alternative gate dielectrics |
| title_fullStr |
Electrical properties of crystalline YSZ films on silicon as alternative gate dielectrics |
| title_full_unstemmed |
Electrical properties of crystalline YSZ films on silicon as alternative gate dielectrics |
| title_sort |
electrical properties of crystalline ysz films on silicon as alternative gate dielectrics |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/82251 |
| _version_ |
1821214265481101312 |