Electrical properties of crystalline YSZ films on silicon as alternative gate dielectrics

Electrical properties of crystalline YSZ films on silicon as alternative gate dielectrics

10.1088/0268-1242/16/3/101

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Bibliographic Details
Main Authors: Wang, S.J., Ong, C.K., Xu, S.Y., Chen, P., Tjiu, W.C., Huan, A.C.H., Yoo, W.J., Lim, J.S., Feng, W., Choi, W.K.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82251
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Institution: National University of Singapore

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