Metal gate/High-K dielectric stack on Si cap/ultra-thin pure Ge epi/Si substrate

• Main Authors: Yeo, C.C., Lee, M.H., Liu, C.W., Choi, K.J., Lee, T.W., Cho, B.J.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/70917
• Institution: National University of Singapore

10.1109/EDSSC.2005.1635217