Metal gate/High-K dielectric stack on Si cap/ultra-thin pure Ge epi/Si substrate

10.1109/EDSSC.2005.1635217

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Bibliographic Details
Main Authors:	Yeo, C.C., Lee, M.H., Liu, C.W., Choi, K.J., Lee, T.W., Cho, B.J.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/70917
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-70917
record_format	dspace
spelling	sg-nus-scholar.10635-709172015-03-06T20:09:02Z Metal gate/High-K dielectric stack on Si cap/ultra-thin pure Ge epi/Si substrate Yeo, C.C. Lee, M.H. Liu, C.W. Choi, K.J. Lee, T.W. Cho, B.J. ELECTRICAL & COMPUTER ENGINEERING 10.1109/EDSSC.2005.1635217 2005 IEEE Conference on Electron Devices and Solid-State Circuits, EDSSC 107-110 2014-06-19T03:17:45Z 2014-06-19T03:17:45Z 2006 Conference Paper Yeo, C.C.,Lee, M.H.,Liu, C.W.,Choi, K.J.,Lee, T.W.,Cho, B.J. (2006). Metal gate/High-K dielectric stack on Si cap/ultra-thin pure Ge epi/Si substrate. 2005 IEEE Conference on Electron Devices and Solid-State Circuits, EDSSC : 107-110. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/EDSSC.2005.1635217" target="_blank">https://doi.org/10.1109/EDSSC.2005.1635217</a> 0780393392 http://scholarbank.nus.edu.sg/handle/10635/70917 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1109/EDSSC.2005.1635217
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Yeo, C.C. Lee, M.H. Liu, C.W. Choi, K.J. Lee, T.W. Cho, B.J.
format	Conference or Workshop Item
author	Yeo, C.C. Lee, M.H. Liu, C.W. Choi, K.J. Lee, T.W. Cho, B.J.
spellingShingle	Yeo, C.C. Lee, M.H. Liu, C.W. Choi, K.J. Lee, T.W. Cho, B.J. Metal gate/High-K dielectric stack on Si cap/ultra-thin pure Ge epi/Si substrate
author_sort	Yeo, C.C.
title	Metal gate/High-K dielectric stack on Si cap/ultra-thin pure Ge epi/Si substrate
title_short	Metal gate/High-K dielectric stack on Si cap/ultra-thin pure Ge epi/Si substrate
title_full	Metal gate/High-K dielectric stack on Si cap/ultra-thin pure Ge epi/Si substrate
title_fullStr	Metal gate/High-K dielectric stack on Si cap/ultra-thin pure Ge epi/Si substrate
title_full_unstemmed	Metal gate/High-K dielectric stack on Si cap/ultra-thin pure Ge epi/Si substrate
title_sort	metal gate/high-k dielectric stack on si cap/ultra-thin pure ge epi/si substrate
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/70917
_version_	1681087288125161472

Metal gate/High-K dielectric stack on Si cap/ultra-thin pure Ge epi/Si substrate

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