Fabrication of nanostructures on polyethylene terephthalate substrate by interference lithography and plasma etching

Fabrication of nanostructures on polyethylene terephthalate substrate by interference lithography and plasma etching

10.1166/jnn.2013.7496

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Bibliographic Details
Main Authors: Zhu, M., Li, B., Choi, W.K.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Interference Lithography
Nanofabrication
Nanostructures
Plasma Etching
Polyethylene Terephthalate
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82337
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-823372023-10-26T22:08:44Z Fabrication of nanostructures on polyethylene terephthalate substrate by interference lithography and plasma etching Zhu, M. Li, B. Choi, W.K. ELECTRICAL & COMPUTER ENGINEERING Interference Lithography Nanofabrication Nanostructures Plasma Etching Polyethylene Terephthalate 10.1166/jnn.2013.7496 Journal of Nanoscience and Nanotechnology 13 8 5474-5480 JNNOA 2014-10-07T04:28:11Z 2014-10-07T04:28:11Z 2013-08 Article Zhu, M., Li, B., Choi, W.K. (2013-08). Fabrication of nanostructures on polyethylene terephthalate substrate by interference lithography and plasma etching. Journal of Nanoscience and Nanotechnology 13 (8) : 5474-5480. ScholarBank@NUS Repository. https://doi.org/10.1166/jnn.2013.7496 15334880 http://scholarbank.nus.edu.sg/handle/10635/82337 000320632200035 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Interference Lithography
Nanofabrication
Nanostructures
Plasma Etching
Polyethylene Terephthalate
spellingShingle Interference Lithography
Nanofabrication
Nanostructures
Plasma Etching
Polyethylene Terephthalate
Zhu, M.
Li, B.
Choi, W.K.
Fabrication of nanostructures on polyethylene terephthalate substrate by interference lithography and plasma etching
description 10.1166/jnn.2013.7496
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Zhu, M.
Li, B.
Choi, W.K.
format Article
author Zhu, M.
Li, B.
Choi, W.K.
author_sort Zhu, M.
title Fabrication of nanostructures on polyethylene terephthalate substrate by interference lithography and plasma etching
title_short Fabrication of nanostructures on polyethylene terephthalate substrate by interference lithography and plasma etching
title_full Fabrication of nanostructures on polyethylene terephthalate substrate by interference lithography and plasma etching
title_fullStr Fabrication of nanostructures on polyethylene terephthalate substrate by interference lithography and plasma etching
title_full_unstemmed Fabrication of nanostructures on polyethylene terephthalate substrate by interference lithography and plasma etching
title_sort fabrication of nanostructures on polyethylene terephthalate substrate by interference lithography and plasma etching
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/82337
_version_ 1781784112773726208

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