Fabrication of nanostructures on polyethylene terephthalate substrate by interference lithography and plasma etching
10.1166/jnn.2013.7496
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Main Authors: | Zhu, M., Li, B., Choi, W.K. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/82337 |
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Institution: | National University of Singapore |
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