Flat band voltage control on low Vt metal-gate/high-κ CMOSFETs with small EOT (Invited Paper)

10.1016/j.mee.2009.03.075

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Bibliographic Details
Main Authors:	Chin, A., Chang, M.F., Lin, S.H., Chen, W.B., Lee, P.T., Yeh, F.S., Liao, C.C., Li, M.-F., Su, N.C., Wang, S.J.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	CMOS EOT High-κ Metal-gate Vfb roll-off
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82366
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82366
record_format	dspace
spelling	sg-nus-scholar.10635-823662024-11-10T17:47:35Z Flat band voltage control on low Vt metal-gate/high-κ CMOSFETs with small EOT (Invited Paper) Chin, A. Chang, M.F. Lin, S.H. Chen, W.B. Lee, P.T. Yeh, F.S. Liao, C.C. Li, M.-F. Su, N.C. Wang, S.J. ELECTRICAL & COMPUTER ENGINEERING CMOS EOT High-κ Metal-gate Vfb roll-off 10.1016/j.mee.2009.03.075 Microelectronic Engineering 86 7-9 1728-1732 MIENE 2014-10-07T04:28:31Z 2014-10-07T04:28:31Z 2009-07 Article Chin, A., Chang, M.F., Lin, S.H., Chen, W.B., Lee, P.T., Yeh, F.S., Liao, C.C., Li, M.-F., Su, N.C., Wang, S.J. (2009-07). Flat band voltage control on low Vt metal-gate/high-κ CMOSFETs with small EOT (Invited Paper). Microelectronic Engineering 86 (7-9) : 1728-1732. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mee.2009.03.075 01679317 http://scholarbank.nus.edu.sg/handle/10635/82366 000267460100053 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	CMOS EOT High-κ Metal-gate Vfb roll-off
spellingShingle	CMOS EOT High-κ Metal-gate Vfb roll-off Chin, A. Chang, M.F. Lin, S.H. Chen, W.B. Lee, P.T. Yeh, F.S. Liao, C.C. Li, M.-F. Su, N.C. Wang, S.J. Flat band voltage control on low Vt metal-gate/high-κ CMOSFETs with small EOT (Invited Paper)
description	10.1016/j.mee.2009.03.075
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Chin, A. Chang, M.F. Lin, S.H. Chen, W.B. Lee, P.T. Yeh, F.S. Liao, C.C. Li, M.-F. Su, N.C. Wang, S.J.
format	Article
author	Chin, A. Chang, M.F. Lin, S.H. Chen, W.B. Lee, P.T. Yeh, F.S. Liao, C.C. Li, M.-F. Su, N.C. Wang, S.J.
author_sort	Chin, A.
title	Flat band voltage control on low Vt metal-gate/high-κ CMOSFETs with small EOT (Invited Paper)
title_short	Flat band voltage control on low Vt metal-gate/high-κ CMOSFETs with small EOT (Invited Paper)
title_full	Flat band voltage control on low Vt metal-gate/high-κ CMOSFETs with small EOT (Invited Paper)
title_fullStr	Flat band voltage control on low Vt metal-gate/high-κ CMOSFETs with small EOT (Invited Paper)
title_full_unstemmed	Flat band voltage control on low Vt metal-gate/high-κ CMOSFETs with small EOT (Invited Paper)
title_sort	flat band voltage control on low vt metal-gate/high-κ cmosfets with small eot (invited paper)
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82366
_version_	1821223164513878016

Flat band voltage control on low Vt metal-gate/high-κ CMOSFETs with small EOT (Invited Paper)

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