Flat band voltage control on low Vt metal-gate/high-κ CMOSFETs with small EOT (Invited Paper)

Flat band voltage control on low Vt metal-gate/high-κ CMOSFETs with small EOT (Invited Paper)

10.1016/j.mee.2009.03.075

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Bibliographic Details
Main Authors: Chin, A., Chang, M.F., Lin, S.H., Chen, W.B., Lee, P.T., Yeh, F.S., Liao, C.C., Li, M.-F., Su, N.C., Wang, S.J.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
CMOS
EOT
High-κ
Metal-gate
Vfb roll-off
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82366
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Institution: National University of Singapore

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