A novel self-aligned offset-gated polysilicon TFT using high-κ dielectric spacers

A novel self-aligned offset-gated polysilicon TFT using high-κ dielectric spacers

10.1109/LED.2004.825206

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Bibliographic Details
Main Authors: Xiong, Z., Liu, H., Zhu, C., Sin, J.K.O.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Others
Published: 2014
Subjects:
High-κ dielectric spacer
Offset-gated
Polysilicon thin-film transistors (Poly-Si TFTs)
Self-aligned
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84384
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/84384

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