Physical and electrical characteristics of high-κ gate dielectric Hf(1-x)LaxOy

Physical and electrical characteristics of high-κ gate dielectric Hf(1-x)LaxOy

10.1016/j.sse.2006.05.008

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Bibliographic Details
Main Authors: Wang, X.P., Li, M.F., Chin, A., Zhu, C.X., Shao, J., Lu, W., Shen, X.C., Yu, X.F., Chi, R., Shen, C., Huan, A.C.H., Pan, J.S., Du, A.Y., Lo, P., Chan, D.S.H., Kwong, D.-L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Hf(1-x)LaxOy
High-κ gate dielectric
Metal gate
MOSFET
Workfunction tuning
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82903
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/82903

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