Physical and electrical characteristics of high-κ gate dielectric Hf(1-x)LaxOy

• Main Authors: Wang, X.P., Li, M.F., Chin, A., Zhu, C.X., Shao, J., Lu, W., Shen, X.C., Yu, X.F., Chi, R., Shen, C., Huan, A.C.H., Pan, J.S., Du, A.Y., Lo, P., Chan, D.S.H., Kwong, D.-L.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Hf(1-x)LaxOy; High-κ gate dielectric; Metal gate; MOSFET; Workfunction tuning
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/82903
• Institution: National University of Singapore

10.1016/j.sse.2006.05.008