Physical and electrical characteristics of high-κ gate dielectric Hf(1-x)LaxOy

10.1016/j.sse.2006.05.008

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Main Authors:	Wang, X.P., Li, M.F., Chin, A., Zhu, C.X., Shao, J., Lu, W., Shen, X.C., Yu, X.F., Chi, R., Shen, C., Huan, A.C.H., Pan, J.S., Du, A.Y., Lo, P., Chan, D.S.H., Kwong, D.-L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Hf(1-x)LaxOy High-κ gate dielectric Metal gate MOSFET Workfunction tuning
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82903
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82903
record_format	dspace
spelling	sg-nus-scholar.10635-829032024-11-14T02:35:03Z Physical and electrical characteristics of high-κ gate dielectric Hf(1-x)LaxOy Wang, X.P. Li, M.F. Chin, A. Zhu, C.X. Shao, J. Lu, W. Shen, X.C. Yu, X.F. Chi, R. Shen, C. Huan, A.C.H. Pan, J.S. Du, A.Y. Lo, P. Chan, D.S.H. Kwong, D.-L. ELECTRICAL & COMPUTER ENGINEERING Hf(1-x)LaxOy High-κ gate dielectric Metal gate MOSFET Workfunction tuning 10.1016/j.sse.2006.05.008 Solid-State Electronics 50 6 986-991 SSELA 2014-10-07T04:34:51Z 2014-10-07T04:34:51Z 2006-06 Article Wang, X.P., Li, M.F., Chin, A., Zhu, C.X., Shao, J., Lu, W., Shen, X.C., Yu, X.F., Chi, R., Shen, C., Huan, A.C.H., Pan, J.S., Du, A.Y., Lo, P., Chan, D.S.H., Kwong, D.-L. (2006-06). Physical and electrical characteristics of high-κ gate dielectric Hf(1-x)LaxOy. Solid-State Electronics 50 (6) : 986-991. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sse.2006.05.008 00381101 http://scholarbank.nus.edu.sg/handle/10635/82903 000239499400015 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Hf(1-x)LaxOy High-κ gate dielectric Metal gate MOSFET Workfunction tuning
spellingShingle	Hf(1-x)LaxOy High-κ gate dielectric Metal gate MOSFET Workfunction tuning Wang, X.P. Li, M.F. Chin, A. Zhu, C.X. Shao, J. Lu, W. Shen, X.C. Yu, X.F. Chi, R. Shen, C. Huan, A.C.H. Pan, J.S. Du, A.Y. Lo, P. Chan, D.S.H. Kwong, D.-L. Physical and electrical characteristics of high-κ gate dielectric Hf(1-x)LaxOy
description	10.1016/j.sse.2006.05.008
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Wang, X.P. Li, M.F. Chin, A. Zhu, C.X. Shao, J. Lu, W. Shen, X.C. Yu, X.F. Chi, R. Shen, C. Huan, A.C.H. Pan, J.S. Du, A.Y. Lo, P. Chan, D.S.H. Kwong, D.-L.
format	Article
author	Wang, X.P. Li, M.F. Chin, A. Zhu, C.X. Shao, J. Lu, W. Shen, X.C. Yu, X.F. Chi, R. Shen, C. Huan, A.C.H. Pan, J.S. Du, A.Y. Lo, P. Chan, D.S.H. Kwong, D.-L.
author_sort	Wang, X.P.
title	Physical and electrical characteristics of high-κ gate dielectric Hf(1-x)LaxOy
title_short	Physical and electrical characteristics of high-κ gate dielectric Hf(1-x)LaxOy
title_full	Physical and electrical characteristics of high-κ gate dielectric Hf(1-x)LaxOy
title_fullStr	Physical and electrical characteristics of high-κ gate dielectric Hf(1-x)LaxOy
title_full_unstemmed	Physical and electrical characteristics of high-κ gate dielectric Hf(1-x)LaxOy
title_sort	physical and electrical characteristics of high-κ gate dielectric hf(1-x)laxoy
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82903
_version_	1821199064310480896

Physical and electrical characteristics of high-κ gate dielectric Hf(1-x)LaxOy

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