In situ surface passivation of gallium nitride for metalOrganic chemical vapor deposition of high-permittivity gate dielectric

10.1109/TED.2010.2084410

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Bibliographic Details
Main Authors:	Liu, X., Chin, H.-C., Tan, L.-S., Yeo, Y.-C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Gallium nitride (GaN) in situ surface passivation interface state density
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82521
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82521
record_format	dspace
spelling	sg-nus-scholar.10635-825212023-10-27T08:38:16Z In situ surface passivation of gallium nitride for metalOrganic chemical vapor deposition of high-permittivity gate dielectric Liu, X. Chin, H.-C. Tan, L.-S. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING Gallium nitride (GaN) in situ surface passivation interface state density 10.1109/TED.2010.2084410 IEEE Transactions on Electron Devices 58 1 95-102 IETDA 2014-10-07T04:30:21Z 2014-10-07T04:30:21Z 2011-01 Article Liu, X., Chin, H.-C., Tan, L.-S., Yeo, Y.-C. (2011-01). In situ surface passivation of gallium nitride for metalOrganic chemical vapor deposition of high-permittivity gate dielectric. IEEE Transactions on Electron Devices 58 (1) : 95-102. ScholarBank@NUS Repository. https://doi.org/10.1109/TED.2010.2084410 00189383 http://scholarbank.nus.edu.sg/handle/10635/82521 000285840100014 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Gallium nitride (GaN) in situ surface passivation interface state density
spellingShingle	Gallium nitride (GaN) in situ surface passivation interface state density Liu, X. Chin, H.-C. Tan, L.-S. Yeo, Y.-C. In situ surface passivation of gallium nitride for metalOrganic chemical vapor deposition of high-permittivity gate dielectric
description	10.1109/TED.2010.2084410
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Liu, X. Chin, H.-C. Tan, L.-S. Yeo, Y.-C.
format	Article
author	Liu, X. Chin, H.-C. Tan, L.-S. Yeo, Y.-C.
author_sort	Liu, X.
title	In situ surface passivation of gallium nitride for metalOrganic chemical vapor deposition of high-permittivity gate dielectric
title_short	In situ surface passivation of gallium nitride for metalOrganic chemical vapor deposition of high-permittivity gate dielectric
title_full	In situ surface passivation of gallium nitride for metalOrganic chemical vapor deposition of high-permittivity gate dielectric
title_fullStr	In situ surface passivation of gallium nitride for metalOrganic chemical vapor deposition of high-permittivity gate dielectric
title_full_unstemmed	In situ surface passivation of gallium nitride for metalOrganic chemical vapor deposition of high-permittivity gate dielectric
title_sort	in situ surface passivation of gallium nitride for metalorganic chemical vapor deposition of high-permittivity gate dielectric
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82521
_version_	1781784161330135040

In situ surface passivation of gallium nitride for metalOrganic chemical vapor deposition of high-permittivity gate dielectric

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