Leakage suppression of gated diodes fabricated under low-temperature annealing with substitutional carbon Si1-yCy incorporation

• Main Authors: Tan, C.F., Chor, E.F., Lee, H., Liu, J., Quek, E., Chan, L.
• 其他作者: ELECTRICAL & COMPUTER ENGINEERING
• 格式: Article
• 出版: 2014
• 主題: Carbon; Junction leakage; Solid-phase epitaxy re-growth (SPER)
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/82616

10.1109/LED.2005.845501