Nonlinearities in a high-Q SOI Lamé-mode bulk resonator

10.1088/0960-1317/19/7/075002

Saved in:

Bibliographic Details
Main Authors:	Shao, L.C., Niu, T., Palaniapan, M.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82772
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-82772
record_format	dspace
spelling	sg-nus-scholar.10635-827722023-10-26T09:42:03Z Nonlinearities in a high-Q SOI Lamé-mode bulk resonator Shao, L.C. Niu, T. Palaniapan, M. ELECTRICAL & COMPUTER ENGINEERING 10.1088/0960-1317/19/7/075002 Journal of Micromechanics and Microengineering 19 7 - JMMIE 2014-10-07T04:33:19Z 2014-10-07T04:33:19Z 2009 Article Shao, L.C., Niu, T., Palaniapan, M. (2009). Nonlinearities in a high-Q SOI Lamé-mode bulk resonator. Journal of Micromechanics and Microengineering 19 (7) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/19/7/075002 09601317 http://scholarbank.nus.edu.sg/handle/10635/82772 000267516800025 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1088/0960-1317/19/7/075002
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Shao, L.C. Niu, T. Palaniapan, M.
format	Article
author	Shao, L.C. Niu, T. Palaniapan, M.
spellingShingle	Shao, L.C. Niu, T. Palaniapan, M. Nonlinearities in a high-Q SOI Lamé-mode bulk resonator
author_sort	Shao, L.C.
title	Nonlinearities in a high-Q SOI Lamé-mode bulk resonator
title_short	Nonlinearities in a high-Q SOI Lamé-mode bulk resonator
title_full	Nonlinearities in a high-Q SOI Lamé-mode bulk resonator
title_fullStr	Nonlinearities in a high-Q SOI Lamé-mode bulk resonator
title_full_unstemmed	Nonlinearities in a high-Q SOI Lamé-mode bulk resonator
title_sort	nonlinearities in a high-q soi lamé-mode bulk resonator
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82772
_version_	1781784219389788160

Nonlinearities in a high-Q SOI Lamé-mode bulk resonator

Similar Items