Rapid thermal oxidation of radio frequency sputtered polycrystalline Si1-xGex thin films

• Main Authors: Natarajan, A., Bera, L.K., Choi, W.K., Osipowicz, T., Seng, H.L.
• 其他作者: ELECTRICAL & COMPUTER ENGINEERING
• 格式: Article
• 出版: 2014
• 主題: Oxidation; Polycrystalline SiGe films; Radio frequency sputtered
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/82968

10.1016/S0038-1101(01)00240-4