Selective wet etching process for Ni-InGaAs contact formation in InGaAs N-MOSFETs with self-aligned source and drain

10.1149/2.020201jes

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Main Authors:	Subramanian, S., Ivana, Zhou, Q., Zhang, X., Balakrishnan, M., Yeo, Y.-C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83001
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83001
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spelling	sg-nus-scholar.10635-830012024-11-10T04:42:37Z Selective wet etching process for Ni-InGaAs contact formation in InGaAs N-MOSFETs with self-aligned source and drain Subramanian, S. Ivana Zhou, Q. Zhang, X. Balakrishnan, M. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1149/2.020201jes Journal of the Electrochemical Society 159 1 H16-H21 JESOA 2014-10-07T04:36:03Z 2014-10-07T04:36:03Z 2012 Article Subramanian, S., Ivana, Zhou, Q., Zhang, X., Balakrishnan, M., Yeo, Y.-C. (2012). Selective wet etching process for Ni-InGaAs contact formation in InGaAs N-MOSFETs with self-aligned source and drain. Journal of the Electrochemical Society 159 (1) : H16-H21. ScholarBank@NUS Repository. https://doi.org/10.1149/2.020201jes 00134651 http://scholarbank.nus.edu.sg/handle/10635/83001 000298253200045 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1149/2.020201jes
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Subramanian, S. Ivana Zhou, Q. Zhang, X. Balakrishnan, M. Yeo, Y.-C.
format	Article
author	Subramanian, S. Ivana Zhou, Q. Zhang, X. Balakrishnan, M. Yeo, Y.-C.
spellingShingle	Subramanian, S. Ivana Zhou, Q. Zhang, X. Balakrishnan, M. Yeo, Y.-C. Selective wet etching process for Ni-InGaAs contact formation in InGaAs N-MOSFETs with self-aligned source and drain
author_sort	Subramanian, S.
title	Selective wet etching process for Ni-InGaAs contact formation in InGaAs N-MOSFETs with self-aligned source and drain
title_short	Selective wet etching process for Ni-InGaAs contact formation in InGaAs N-MOSFETs with self-aligned source and drain
title_full	Selective wet etching process for Ni-InGaAs contact formation in InGaAs N-MOSFETs with self-aligned source and drain
title_fullStr	Selective wet etching process for Ni-InGaAs contact formation in InGaAs N-MOSFETs with self-aligned source and drain
title_full_unstemmed	Selective wet etching process for Ni-InGaAs contact formation in InGaAs N-MOSFETs with self-aligned source and drain
title_sort	selective wet etching process for ni-ingaas contact formation in ingaas n-mosfets with self-aligned source and drain
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83001
_version_	1821230492559605760

Selective wet etching process for Ni-InGaAs contact formation in InGaAs N-MOSFETs with self-aligned source and drain

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