SIMS study of silicon oxynitride rapid thermally grown in nitric oxide
10.1016/S0218-625X(01)00145-2
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2014
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sg-nus-scholar.10635-830242024-11-12T21:17:14Z SIMS study of silicon oxynitride rapid thermally grown in nitric oxide Liu, R. Koa, K.H. Wee, A.T.S. Lai, W.H. Li, M.F. See, A. Chan, L. ELECTRICAL & COMPUTER ENGINEERING INSTITUTE OF ENGINEERING SCIENCE PHYSICS 10.1016/S0218-625X(01)00145-2 Surface Review and Letters 8 5 569-573 SRLEF 2014-10-07T04:36:20Z 2014-10-07T04:36:20Z 2001 Article Liu, R.,Koa, K.H.,Wee, A.T.S.,Lai, W.H.,Li, M.F.,See, A.,Chan, L. (2001). SIMS study of silicon oxynitride rapid thermally grown in nitric oxide. Surface Review and Letters 8 (5) : 569-573. ScholarBank@NUS Repository. <a href="https://doi.org/10.1016/S0218-625X(01)00145-2" target="_blank">https://doi.org/10.1016/S0218-625X(01)00145-2</a> 0218625X http://scholarbank.nus.edu.sg/handle/10635/83024 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
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NUS Library |
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| description |
10.1016/S0218-625X(01)00145-2 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Liu, R. Koa, K.H. Wee, A.T.S. Lai, W.H. Li, M.F. See, A. Chan, L. |
| format |
Article |
| author |
Liu, R. Koa, K.H. Wee, A.T.S. Lai, W.H. Li, M.F. See, A. Chan, L. |
| spellingShingle |
Liu, R. Koa, K.H. Wee, A.T.S. Lai, W.H. Li, M.F. See, A. Chan, L. SIMS study of silicon oxynitride rapid thermally grown in nitric oxide |
| author_sort |
Liu, R. |
| title |
SIMS study of silicon oxynitride rapid thermally grown in nitric oxide |
| title_short |
SIMS study of silicon oxynitride rapid thermally grown in nitric oxide |
| title_full |
SIMS study of silicon oxynitride rapid thermally grown in nitric oxide |
| title_fullStr |
SIMS study of silicon oxynitride rapid thermally grown in nitric oxide |
| title_full_unstemmed |
SIMS study of silicon oxynitride rapid thermally grown in nitric oxide |
| title_sort |
sims study of silicon oxynitride rapid thermally grown in nitric oxide |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/83024 |
| _version_ |
1821211717269454848 |