Strained silicon nanowire p-channel FETs with diamond-like carbon liner stressor

Strained silicon nanowire p-channel FETs with diamond-like carbon liner stressor

10.1109/LED.2010.2074182

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Bibliographic Details
Main Authors: Liu, B., Wong, H.-S., Yang, M., Yeo, Y.-C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Diamond-like carbon (DLC)
nanowire
p-FET
strain
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83083
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/83083

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